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Inertial sensors

First Sensor features a highly innovative
technology platform for manufacturing high-precision inertial sensors
for geoengineering, condition monitoring or navigation applications. The
MEMS sensors allow for flexible customization to fit your individual
application requirements.

Inclinometers and accelerometers

The capacitive inclinometers and accelerometers are based on
singlecrystal silicon sensor elements and utilize state-of-the-art
micromachining technology to achieve large signal-tonoise ratios and
excellent stability over temperature. Therefore, they are able to detect
extremely small changes in inclination or acceleration.
Due to high aspect ratio microstructures (HARMS) the sensors feature
ultra-low cross axis sensitivities. Further, the patented highly
flexible AIM (Air gap Insulated Microstructures) technology minimizes
parasitic capacitances.

Evaluation boards

Different evaluation boards for simple and fast read-out of the sensor data are available.

The inclinometers offer measurement ranges of ±30 ° and achieve noise densities smaller 0.0004 °/√Hz and resolutions smaller 0.0015 ° at 10 Hz measuring frequency. First Sensor’s accelerometers with measurement ranges of ±8 g and ±15 g achieve noise densities smaller 30 µg/√Hz and resolutions smaller 95 µg at 10 Hz measuring frequency. Due to the modular semiconductor technology all inertial sensors can be easily and cost-effectively customized to fit individual application requirements. The MEMS capacitive sensing element together with an ASIC for signal conditioning is integrated in a hermetically sealed SMD package ready for assembling on PCB’s. Further, different evaluation boards for easy-to-use read-out of the sensor data are available.

First Sensor’s new high precision inclinometers and accelerometers can be used in industry, aviation as well as building and medical technology. Typical applications include geoengineering, condition monitoring, inertial navigation systems as well as robotics, alignment and leveling.